The primary objective of the proposed work is to verify the reliability and sensitivity of solid-state electrochemical sensors for detecting surface contaminants and moisture on pre-bond surfaces. Sensors, made using the novel concepts applied to solid-state electrochemical materials, were found to be very sensitive in experiments with polyester peel ply samples. However, the method has not been tested for other peel ply samples that may have more or less contamination and/or moisture levels. In addition, the correlation between the features of the signals and surface chemistry condition has not been established. The proposed work will be focused on comprehensive testing and evaluation of the sensors. The proposed work will also be focused on atomic force microscopy (AFM) and chemical force microscopy (CFM) analysis of the sample surfaces prepared with peel ply.